-
System
Module
Parts No.
Discription
Option
Short Name
-
AMAT
Cylinder
0010-39474
ASP Lift Cylinder Kit
-
AMAT
EPD System
0010-10556
Monochromator
-
AMAT
EPD System
0010-10973
HOT PACK
-
AMAT
EPD System
0010-10555
End Point PC
-
AMAT
HV Module
0010-11239
HV MODULE 5KV ASSY, 200MM CESC,EMAX
-
AMAT
HV Module
0010-04926
HV MODULE ASSY, CESC,300MM
-
AMAT
HV Module
0010-30091
HV MODULE ASSY, ESC
-
AMAT
HV Module
0010-09933
HV MODULE ASSY, ESC
-
AMAT
HV Module
0010-10901
HV MODULE ASSY, RF BOXGECO
-
AMAT
HV Module
0010-93076
HV FILTER BOX ASSY W/NEGATIVE
-
AMAT
HV Module
0010-30139
ASSY, HV FILTER DPS CHAMBER POSITIVE
-
AMAT
RF Match
0010-09416
ASSY RF MATCH, ETCH
-
AMAT
RF Match
0010-09490
ASSY RF MATCH BW ETCHBACK
-
AMAT
RF Match
0010-30686
HIGH EFFICIENCY RF MATCH, ETCH, MXP+/ EMAX+
-
AMAT
RF Match
0010-00854
ASSY, RF BIAS MATCH R1 DPS+ POLY CHAMBER
-
AMAT
RF Match
0010-36408
ASSY, RF MATCH DPS CHAMBER
-
AMAT
Board
0100-35064
PCB ASSY, AC DISTRIPTION BD
-
AMAT
Board
0100-00215
PCB ASSY, AC DISTRIPTION BD
-
AMAT
Board
0100-20012
ISOLATION AMPLIFIER BD
-
AMAT
Board
0100-20037
PCB ASSY, INTERLOCK SELECT
-
AMAT
Board
0100-20038
PCB ASSY, RELAY CONTROL
-
AMAT
Board
0190-76005
SPEC CNTL DWG, INTELLIGENT MOTOR CONTROLLER
Old Version
-
AMAT
Board
0190-01227
SPEC CONTROL DWG INTELLIGENT MOTOR CONTROLLER, VX2
New Version
-
AMAT
Board
0090-76133
V452 SBC BOARD
-
AMAT
Board
0100-20001
SYSTEM ELECTRONIC INTERFACE BOARD
-
AMAT
Board
0100-20173
STEPPER CONTROLLER BOARD
-
AMAT
Board
0100-02735
PCB, VGA VIDEO CONTROLLER Board
-
AMAT
Board
0100-35058
ASSY PCB,LOADLOCK INTERLOCKS
-
AMAT
Board
0100-35053
PCB ASSY,MAINFRAME INTERLOCKS
-
AMAT
Board
0100-00396
PCB ASSY, ANALOG I/O BOARD (신형)
-
AMAT
Board
0100-20100
PCB ASSY, ANALOG INPUT/ OUTPUT (구형)
-
AMAT
Board
0100-01321
ASSY PCB DIGITAL I/O DIO BD (신형)
-
AMAT
Board
0100-76124
DIGITAL INPUT OUTPUT PCB (구형)
-
AMAT
Board
0190-70108
ASSY, PCB MXP CHAMBER INTERFACE
-
AMAT
Board
0100-35054
PCB Assy Chamber Interface
-
AMAT
Board
0100-35250
PCB ASSY CHAMBER INTERFACE DPS CENTURA
-
AMAT
Board
0090-00362
1 ELEC. ASSY, OTF CONTROL
Only HP Use
-
AMAT
Board
0090-00362
1 ELEC. ASSY, OTF CONTROL
-
AMAT
Board
012685-102
Convectron PCB
-
AMAT
Board
0100-20063
PCB ASSY, TC GAUGE
-
AMAT
Board
0100-35120
PCB, DUAL GAS LEAK DETECTOR
-
AMAT
Board
0100-35049
ASSY, PCB SYS RESET/INTLK SEL
-
AMAT
Board
0100-35065
PCB ASSY, SERIAL ISOLATOR
-
AMAT
ASP
0010-37402
Assembly, Hose, 96" LG
-
AMAT
ASP
0010-30104
Assembly, Hose, Insulated, 58" LG
-
AMAT
ASP
0010-09174
ASP Throttle assembly
-
AMAT
Restrictor
3510-01046
500SCCM He 30PSI
-
AMAT
Restrictor
3510-01055
ORF RSTR Flow 50SCCM N2@35PSI 10RA 1/4VCR
-
AMAT
Restrictor
3870-01644
Valve Check Inline 1/4"VCR F/M SST CW Series
-
AMAT
Restrictor
3870-01669
Valve Check 2PSID 1/4VCR 7RA
-
AMAT
Restrictor
3510-01103
ORF RSTR Flow 5SLM N2 30 PSI 1/4VCR
-
AMAT
Restrictor
4020-01214
FLTR In-Line Gas 750PSIG 1/4VCRMM
-
AMAT
Restrictor
3510-01053
RSTR Flow 20SCCM N2@20PSI 1/4VCR-M/M
-
AMAT
Restrictor
3510-01054
ORF RSTR Flow 5SLM N2@ 30PSI 1/4VCR
-
AMAT
Restrictor
3510-01073
ORF RSTR Flow 250SCCM N2@ 45PSI 1/4VCR 5RA SST
-
AMAT
Restrictor
3870-02659
Valve Check Inline 2PSIG 1/2VCR-M/M SST
-
AMAT
Gate Valve
0010-01360
Slit Door Assy
-
AMAT
Gate Valve
0010-35482
Assy Heated Gate Valve
-
AMAT
Gate Valve
VAT Pandulum Gate Valve
-
AMAT
Gate Valve
VAT Cryo Gate Valve
-
AMAT
Throttle Valve
0010-09968
Throttle Valve Assy Heated Removable
-
AMAT
Throttle Valve
0010-30135
Assy Throttle Valve Metal DPS
-
AMAT
Throttle Valve
0010-35673
Assy Throttle Valve Poly DPS
-
AMAT
ISO Valve
0190-13041
Two Stage Slow Pumping NW50
-
AMAT
ISO Valve
0010-20664
Slit Valve Actuator Assy
-
AMAT
ISO Valve
3870-02332
Valve ASSY Heated 3Port 208VAC 316SST
DPS Manometer ISO Valve
-
AMAT
ISO Valve
3870-02226
MKS NW 25 Iso Valve
-
AMAT
ISO Valve
3870-02225
MKS NW 40 Iso Valve
-
AMAT
ISO Valve
0190-76185
MKS 2 Stage NW40 Loadlock Roughing Valve
-
AMAT
ISO Valve
3870-01162
Nor-Cal NW 50
-
AMAT
ISO Valve
3870-01215
Nor-Cal NW 25
-
AMAT
ISO Valve
3870-01919
Nor-Cal NW 40
-
AMAT
DTCU
0010-06121
E-DTCU
-
AMAT
DTCU
0010-38754
Assy HR DTCU DPS Shamber
-
AMAT
DTCU
0010-06222
Assy ES DTCU Poly Chamber
-
AMAT
DTCU
0010-00877
DPS METAL R1 DTCU ASSY
-
AMAT
Cathode
0010-30137
DPS Cathode 150MM
-
AMAT
Cathode
0010-30134
DPS,CATHODE,200MM
-
AMAT
Cathode
0010-01507
DPS,CATHODE,200MM, CERAMIC ( Dual He )
-
AMAT
Loadlock
0010-76800
BASIC INDEXER ASSY, NON-ENP CORROS. RESISTANT
-
AMAT
Loadlock
0010-13143
ASSY, UNIVERSAL WBLL CASSETTE PLATFORM
-
AMAT
Loadlock
0242-76372
Wide Body Loadlock Assy (A,B Full Set)
-
AMAT
Loadlock
0010-20286
ASSY, NB INDEXER RIGHT AUTOMATED LOAD LOCK
-
AMAT
Loadlock
0010-20285
ASSY, NB INDEXER LEFT AUTOMATED LOAD LOCK
-
AMAT
Loadlock
0010-22256
ASSY, NB Cassette 25 SLOT 200MM AUTO HANDER,LLB
-
AMAT
Loadlock
0010-22256
ASSY, NB Cassette 25 SLOT 200MM AUTO HANDER,LLA
-
AMAT
Loadlock
0010-75004
NB Loadlock A Set
-
AMAT
Loadlock
0010-75005
NB Loadlock B Set
-
AMAT
Chamber
0040-02544
DPS Upper Chamber Assy
-
AMAT
Chamber
0010-30119
DPS Metal Ceramic Dome Assy
-
AMAT
Chamber
0090-36126
SW VACUUM 75 TORR VCR-4 CLOSE DECREASING
-
AMAT
Chamber
1270-01842
SWPRESS VAC SPST OPEN@7MMHG DECR 1/4VCR
-
AMAT
Chamber
0010-30138
Main Lift Cylinder
-
AMAT
Chamber
0010-30137
DPS Cathode(150mm) Assy
-
AMAT
Chamber
0010-30134
DPS Cathode(200mm) Assy
-
AMAT
Chamber
0021-09625
DPS Metal Lower Chamber
-
AMAT
Chamber
0021-36743
DPS Poly Lower Chamber
-
AMAT
WxP
0010-09917
Endpoint Detector Sensor Head
Assembly
-
AMAT
WxP
0240-32129
8" WxP Cathode assy
-
AMAT
WxP
0010-10460
Tubo Purge Assembly
