-
System
Module
Parts No.
Discription
Option
Short Name
-
Axcelis
Spare Kit - II
398432
Kit, Left Emitter Assembly
-
Axcelis
Spare Kit - II
258161
Motor Assembly, Cassette Handler Platform
-
Axcelis
Spare Kit - II
285621
Gage, Photohelic Switch
-
Axcelis
Spare Kit - II
250133
Fitting, Plastic “T” Miniature (PWB Interface)
-
Axcelis
Spare Kit - II
286971
Filter, ¼ VCR Inline Gas (Outlet, Gas System)
-
Axcelis
Spare Kit - II
286973
Filter, ¼ VCR Inline Gas (Inlet, Gas System)
-
Axcelis
Spare Kit - II
257625
Extend/Retract Assembly, 3-Axis Robot Right Motor
-
Axcelis
Spare Kit - II
257626
Extend/Retract Assembly, 3-Axis Robot Left Motor
-
Axcelis
Spare Kit - II
288511
Cable Assembly, Gate Down Cylinder Sensor
-
Axcelis
Spare Kit - II
251172
Cable Assembly, 3-Axis Coiled
-
Axcelis
Spare Kit - II
249961
Bushing, Keyless Trantorque, ¼ Shaft
-
Axcelis
Spare Kit - II
257641
Brake Assembly, 3-Axis Robot Power Off
-
Axcelis
Spare Kit - II
431161
Bearing, Radial Ball
-
Axcelis
Spare Kit - II
400362
Ball Screw Assembly, 3-Axis Robot
-
Axcelis
Spare Kit - I
280761
Reflector, Lamp
-
Axcelis
Spare Kit - I
438632
Photocell Assembly, Modified
-
Axcelis
Spare Kit - I
319371
Magnetron Assembly
-
Axcelis
Spare Kit - I
31562
Lamp, Germicidal (Ignitor Bulb), 10.5V, 0.35A, 3W
-
Axcelis
Spare Kit - I
286177
Lamp, Long Life, 120 Vac, 1000 Watt
-
Axcelis
Spare Kit - I
464913
Belt, Timing (Vertical Drive and Primary, Low), 0.80 Pitch, .38 Wide
-
Axcelis
Spare Kit - I
464911
Belt, Timing (Secondary, Upper, Rotate Drive), 0.80 Pitch, .38 Wide
-
Axcelis
Spare Kit - I
200998
Belt, 4 mm Pitch Drive Chain, 73 Pitch
-
Axcelis
Vacuum Assembly
282103
Seal, Centering Ring, NW50
-
Axcelis
Vacuum Assembly
280561
Seal, Centering Ring, Modification, NW50
-
Axcelis
Vacuum Assembly
282101
Seal, Centering Ring, NW16
-
Axcelis
Vacuum Assembly
285481
Valve, Throttle, Exhaust
-
Axcelis
Vacuum Assembly
280581
Valve, Throttle, Exhaust
-
Axcelis
Vacuum Assembly
314831
Top O-ring, Kalrez, #226, 1.984 ID x .139 Wide
-
Axcelis
Vacuum Assembly
285677
Bottom O-Ring, Viton, 2-233, 2.859 ID x .139 Wide
-
Axcelis
Vacuum Assembly
309211
Valve, Vacuum (Foreline)
-
Axcelis
Vacuum Assembly
280481
Valve, Vacuum (Foreline)
-
Axcelis
SMIF Platform
423622
Wafer Detection Tower Cable
-
Axcelis
SMIF Platform
303272
Wafer Detection Tower Board PWB Assembly, 8”/26 Wafer
-
Axcelis
SMIF Platform
303362
Wafer Detection Tower Board PWB Assembly, 8”/25 Wafer
-
Axcelis
SMIF Platform
430592
Wafer Detect Tower Flags Cable Assembly
-
Axcelis
SMIF Platform
430591
Wafer Detect Tower Flags Cable Assembly
-
Axcelis
SMIF Platform
430602
Wafer Detect Motor Extension Cable Assembly
-
Axcelis
SMIF Platform
430601
Wafer Detect Motor Extension Cable Assembly
-
Axcelis
SMIF Platform
410261
Tower Flag
-
Axcelis
SMIF Platform
407801
Tower Cassette Handler Pivot Arm
-
Axcelis
SMIF Platform
259861
Thrust Washer, .50 Bore
-
Axcelis
SMIF Platform
440721
Spherical Bearing
-
Axcelis
SMIF Platform
407831
SMIF Tower Pivot Shaft
-
Axcelis
SMIF Platform
407851
SMIF Tower Motor Spacer
-
Axcelis
SMIF Platform
430991
SMIF Tower Motor Assembly
-
Axcelis
SMIF Platform
424111
SMIF Right Rotational Flag
-
Axcelis
SMIF Platform
424101
SMIF Left Rotational Flag
-
Axcelis
SMIF Platform
416892
SMIF Interrupter Gymbal Rod
-
Axcelis
SMIF Platform
416891
SMIF Interrupter Gymbal Rod
-
Axcelis
SMIF Platform
398931
SMIF Indexer Lower Nut
-
Axcelis
SMIF Platform
463931
SMIF Cassette Handler Tower Board, 8 /26 Wafer
-
Axcelis
SMIF Platform
425901
SMIF Cam Follower Shaft
-
Axcelis
SMIF Platform
407811
Shaft Driven Lead Screw
-
Axcelis
SMIF Platform
259851
Roller Needle Bearing, .50
-
Axcelis
SMIF Platform
440831
Ribbon Cable
-
Axcelis
SMIF Platform
420161
Flex Interconnect Board PWB Assembly Ribbon
-
Axcelis
SMIF Platform
81053
Retaining Ring, .250 Shaft
-
Axcelis
SMIF Platform
414551
Pod Base/Wafer Detect Interface Board PWB Assembly
-
Axcelis
SMIF Platform
422131
Nut Guide Sleeve, 0.3125
-
Axcelis
SMIF Platform
259841
Needle Thrust Roller, .500
-
Axcelis
SMIF Platform
426041
Lower Pod Lift Flag
-
Axcelis
SMIF Platform
416621
Load Position Horizontal Flag
-
Axcelis
SMIF Platform
438841
Linear Rail Assembly
-
Axcelis
SMIF Platform
416361
SMIF Gymbal
-
Axcelis
SMIF Platform
439012
Extension Spring
-
Axcelis
SMIF Platform
407841
Dual Cassette Handler Tower
-
Axcelis
SMIF Platform
422141
Driven Guide Nut
-
Axcelis
SMIF Platform
44854
Dowel Pin,.1251/.1253 Dia, 1.25lg, SS, Hardened
-
Axcelis
SMIF Platform
439171
Dowel Pin
-
Axcelis
SMIF Platform
438951
Compression Spring
-
Axcelis
SMIF Platform
438931
Compression Spring
-
Axcelis
SMIF Platform
438941
Compression Spring
-
Axcelis
SMIF Platform
64481
Chuck Interrupter PWB Assembly
-
Axcelis
SMIF Platform
410271
Cassette Handler Tower Cover
-
Axcelis
SMIF Platform
463891
Cassette Handler Tower Board Cover, 8”/26 Wafer
-
Axcelis
SMIF Platform
258931
Cassette Handler Top Tower Cover
-
Axcelis
SMIF Platform
407821
Cassette Handler Lead Screw
-
Axcelis
SMIF Platform
258201
Cassette Handler Gymbal
-
Axcelis
SMIF Platform
437632
Cassette Handler Cover
-
Axcelis
SMIF Platform
437631
Cassette Handler Cover
-
Axcelis
SMIF Platform
258421
Cassette Handler Clevis Pin
-
Axcelis
SMIF Platform
430581
Pod Base Control Cable Assembly
-
Axcelis
SMIF Platform
422121
Ballscrew
-
Axcelis
SMIF Platform
37975
Ball Bearing, .625 OD X .250 ID X .196 W
-
Axcelis
SMIF Platform
440731
Ball Bearing
-
Axcelis
SMIF Platform
440871
Ball Bearing
-
Axcelis
SMIF Platform
440711
Ball Bearing
-
Axcelis
SMIF Platform
398951
Adjustment Indexer Screw
-
Axcelis
SMIF Platform
439031
14:1 Ratio Gear Motor
-
Axcelis
SMIF Assembly
445941
Port Door
-
Axcelis
SMIF Assembly
437601
SMIF Cassette Platform
-
Axcelis
SMIF Assembly
430622
SMIF Pod Interconnect Cable Assembly
-
Axcelis
SMIF Assembly
430621
SMIF Pod Interconnect Cable Assembly
-
Axcelis
SMIF Assembly
430552
Left SMIF Pod Port Cable Assembly
-
Axcelis
SMIF Assembly
430551
Right SMIF Pod Port Cable Assembly
-
Axcelis
SMIF Assembly
430541
SMIF COver Up/cassette Flags Cable Assembly
-
Axcelis
SMIF Assembly
430521
Vertical Motor Power/brake Cable Assembly
-
Axcelis
SMIF Assembly
430511
Vertical Motor Encoder Cable Assembly
-
Axcelis
SMIF Assembly
411792
Left SMIF Pod Lift Assembly
-
Axcelis
SMIF Assembly
411791
Right SMIF Pod Lift Assembly
