-
System
Module
Parts No.
Discription
Option
Short Name
-
Axcelis
Gas Box
392331
Detector Cable, End Point
-
Axcelis
Gas Box
393661
Cable Assembly, Right Enclosure
-
Axcelis
Gas Box
393641
Cable Assembly, Right Gas Control
-
Axcelis
Gas Box
392581
Cable Assembly, Left Gas Control
-
Axcelis
Gas Box
393631
Cable Assembly, Gas Control
-
Axcelis
Gas Box
392571
Cable Assembly, Gas Control
-
Axcelis
Gas Box
392601
Cable Assembly, Enclosure/Purge
-
Axcelis
Gas Box
392591
Cable Assembly, DC Power
-
Axcelis
Gas Box
393651
Cable Assembly, DC Power
-
Axcelis
Gas Box
392303
Cable, Right Side MFC Control
-
Axcelis
Gas Box
392304
Cable, Right Side MFC Control
-
Axcelis
Gas Box
392301
Cable, Right Side MFC Control
-
Axcelis
Gas Box
392302
Cable, Right Side MFC Control
-
Axcelis
Gas Box
392305
Cable, Right Side MFC Control
-
Axcelis
Gas Box
392306
Cable, Right Side MFC Control
-
Axcelis
Gas Box
392314
Cable, Left Side MFC Control
-
Axcelis
Gas Box
392313
Cable, Left Side MFC Control
-
Axcelis
Gas Box
392316
Cable, Left Side MFC Control
-
Axcelis
Gas Box
392315
Cable, Left Side MFC Control
-
Axcelis
Gas Box
392312
Cable, Left Side MFC Control
-
Axcelis
Gas Box
392311
Cable, Left Side MFC Control
-
Axcelis
Gas Box
392281
Cable, Left Gas Panel STD I/O
-
Axcelis
Gas Box
392271
Cable, Gas Box STD I/O “A”
-
Axcelis
EPD
389951
Quartz, Fiber Optics
-
Axcelis
EPD
562241
Monochromator Sub-Assembly
-
Axcelis
EPD
286261
Monochromator, Model EP200Mmd
-
Axcelis
EPD
390821
Coupler, Optical
-
Axcelis
DC Power
321531
PWB Assembly, DC Power Distribution
-
Axcelis
Coldplate
417081
Valve, Solenoid
-
Axcelis
Coldplate
413091
Valve Metering
-
Axcelis
Coldplate
410131
Tubing, Polyurethane, 5/32” OD
-
Axcelis
Coldplate
416321
Tubing, Polyurethane, 1/8” OD
-
Axcelis
Coldplate
416323
Tubing, Polyurethane, 1/4” OD
-
Axcelis
Coldplate
26362
Switch, SPST NC Thermal, 185°F, 170°F Close, 120 V, 12 A
-
Axcelis
Coldplate
401393
Station, Vacuum
-
Axcelis
Coldplate
28324
Spring, Compression
-
Axcelis
Coldplate
403372
Silencer, Exhaust
-
Axcelis
Coldplate
403251
Regulator, Pressure
-
Axcelis
Coldplate
99303
Pin, Cold Plate, 3.12" Long
-
Axcelis
Coldplate
99281
Pin, Bearing, Cold Plate
-
Axcelis
Coldplate
485421
Harness Assembly, Cold Plate
-
Axcelis
Coldplate
417072
Cylinder, Pancake
-
Axcelis
Coldplate
1-200761
Valve, Needle Adjustable, 0 - 2000 psi
-
Axcelis
Coldplate
1-026362
Switch, SPST NC Thermal, 185(F, 170(F Close, 120V, 12A
-
Axcelis
Coldplate
259153
Spring, Compression, 0.180 OD, 1.75 Free Length, Music Wire
-
Axcelis
Coldplate
64481
PWB Assembly, Chuck Interrupter
-
Axcelis
Coldplate
99303
Pin, Cold Plate, 3.12" Long
-
Axcelis
Coldplate
99281
Pin, Bearing, Cold Plate
-
Axcelis
Coldplate
268341
Guide, Cold Plate Teflon
-
Axcelis
Coldplate
218321
Flag, Cold Plate Interrupt
-
Axcelis
Coldplate
64744
Cylinder, Pancake, 1.00 Stroke, 1.12 Bore
-
Axcelis
Coldplate
284301
Valve, Metering, 10-32 UNF Port
-
Axcelis
Coldplate
284311
Valve, 3-Way Solenoid
-
Axcelis
Coldplate
200791
Regulator, Air, 0 - 300 psi
-
Axcelis
Coldplate
98841
PWB Assembly, Cold Plate Interconnect Board
-
Axcelis
Coldplate
283791
Manifold Gate, Process Chamber Control
-
Axcelis
Coldplate
200941
Hose, Urethane, 1/8” OD x 1/16” ID
-
Axcelis
Coldplate
399842
Harness Assembly, Chamber
-
Axcelis
Coldplate
399841
Harness Assembly, Chamber
-
Axcelis
Coldplate
35204
Gage, Air Pressure, 0 to 30 psi, 1.5 Dia.
-
Axcelis
Coldplate
399141
Valve, Electric/Pneumatic Air, 0 - 105 psi, 24 Vdc
-
Axcelis
Coldplate
45965
Valve, Air Adjustable Needle, 0 - 100 psi, -30 to 230 F
-
Axcelis
Coldplate
399161
Tubing, Silicone Rubber
-
Axcelis
Coldplate
33119
Tube, Gray Urethane, 105 psi, .125 ID x .250 OD
-
Axcelis
Coldplate
398261
Switch, Differential Pressure, 1/8 NPT
-
Axcelis
Coldplate
422311
Switch Assembly, Vacuum
-
Axcelis
Coldplate
200791
Regulator, Air, 0 - 300 psi
-
Axcelis
Coldplate
209511
Pump, Vacuum Transducer, 28.0" Hg, 1.1 SCFM
-
Axcelis
Coldplate
200942
Hose, White Urethane, 1/8” OD x 1/16” ID
-
Axcelis
Coldplate
200943
Hose, Red Urethane, 1/8” OD x 1/16” ID
-
Axcelis
Coldplate
200944
Hose, Green Urethane, 1/8” OD x 1/16” ID
-
Axcelis
Coldplate
200941
Hose, Clear Urethane, 1/8” OD x 1/16” ID
-
Axcelis
Coldplate
422301
Harness Assembly, Solenoid
-
Axcelis
Coldplate
35202
Gage, Air Pressure, 0 to 60 psi, 1.5" Dia.
-
Axcelis
Coldplate
398241
Cold Plate Control Manifold Assembly
-
Axcelis
Coldplate
392611
Cable Assembly, Left Process Chamber Control
-
Axcelis
Coldplate
393001
Cable Assembly, Interface Lamp Control
-
Axcelis
Coldplate
392641
Cable Assembly, Cold Plate DC Power
-
Axcelis
Coldplate
392621
Cable Assembly, Cold Plate Control
-
Axcelis
Coldplate
442831
Cable Assembly, Cold Plate
-
Axcelis
Cassette Handler
259861
Washer, Thrust
-
Axcelis
Cassette Handler
258221
Tower, Cassette Handler
-
Axcelis
Cassette Handler
258451
Switch, Cassette Handler Limit, Modification
-
Axcelis
Cassette Handler
259152
Spring, Compression
-
Axcelis
Cassette Handler
259151
Spring, Compression
-
Axcelis
Cassette Handler
258391
Screw, Cassette Handler Lead
-
Axcelis
Cassette Handler
258021
Screw, Cassette Handler Adjustment
-
Axcelis
Cassette Handler
259841
Roller, Needle Thrust
-
Axcelis
Cassette Handler
303272
PWB Assembly, Wafer Detection Tower, 8"/26 Wafer
-
Axcelis
Cassette Handler
303271
PWB Assembly, Wafer Detection Tower, 8"/26 Wafer
-
Axcelis
Cassette Handler
303362
PWB Assembly, Wafer Detection Tower, 8"/25 Wafer
-
Axcelis
Cassette Handler
303361
PWB Assembly, Wafer Detection Tower, 8"/25 Wafer
-
Axcelis
Cassette Handler
302763
PWB Assembly, Wafer Detection Tower, 5” & 6" Wafer
-
Axcelis
Cassette Handler
302762
PWB Assembly, Wafer Detection Tower, 5” & 6" Wafer
-
Axcelis
Cassette Handler
302761
PWB Assembly, Wafer Detection Tower, 5” & 6" Wafer
-
Axcelis
Cassette Handler
249141
PWB Assembly, Dual Cassette Handler Board
-
Axcelis
Cassette Handler
64481
PWB Assembly, Chuck Interrupter
-
Axcelis
Cassette Handler
258104
Pivot Bearing Assembly, Right
-
Axcelis
Cassette Handler
258103
Pivot Bearing Assembly, Left
-
Axcelis
Cassette Handler
258161
Motor Assembly, Cassette Handler Platform
