-
System
Module
Parts No.
Discription
Option
Short Name
-
Axcelis
Assembly
389074
High Voltage SMPS Assembly, Left, European Version
-
Axcelis
Assembly
389072
High Voltage SMPS Assembly, Right, European Version
-
Axcelis
Assembly
422771
Glide Pad Assembly
-
Axcelis
Assembly
320092
Gasbox Assembly, 6 Channel, Standard
-
Axcelis
Assembly
320091
Gasbox Assembly, 6 Channel
-
Axcelis
Assembly
322421
Gasbox Assembly, 4 Channel, Tylan
-
Axcelis
Assembly
322422
Gasbox Assembly, 4 Channel, Standard
-
Axcelis
Assembly
322423
Gasbox Assembly, 3 Channel, Standard
-
Axcelis
Assembly
438921
Front/Rear Switch Box
-
Axcelis
Assembly
477232
Front Display Assembly - Touchscreen
-
Axcelis
Assembly
342431
Front Display Assembly - Touchscreen
-
Axcelis
Assembly
395931
Front Display Assembly - Non-Touchscreen
-
Axcelis
Assembly
342432
Front Display Assembly - Non-Touchscreen
-
Axcelis
Assembly
390361
Endpoint Detector Module
-
Axcelis
Assembly
321531
DC Power Distribution PWB Assembly
-
Axcelis
Assembly
431901
Cold Plate Assembly
-
Axcelis
Assembly
385722
Cold Plate Assembly
-
Axcelis
Assembly
399441
Chamber/Cold Plate Control Access Assembly
-
Axcelis
Assembly
448142
Cassette Handler with Ergo Loader, 8”/25 Wafer, Mirror Finish, Intel Style
-
Axcelis
Assembly
448144
Cassette Handler with Ergo Loader, 8”/25 Wafer, Mirror Finish, IBM Style
-
Axcelis
Assembly
448141
Cassette Handler with Ergo Loader, 8”/25 Wafer, Brush Finish, Intel Style
-
Axcelis
Assembly
448143
Cassette Handler with Ergo Loader, 8”/25 Wafer, Brush Finish, IBM Style
-
Axcelis
Assembly
448147
Cassette Handler with Ergo Loader, 6”/25 Wafer, Mirror Finish, Intel Style
-
Axcelis
Assembly
448149
Cassette Handler with Ergo Loader, 6”/25 Wafer, Mirror Finish, IBM Style
-
Axcelis
Assembly
448146
Cassette Handler with Ergo Loader, 6”/25 Wafer, Brush Finish, Intel Style
-
Axcelis
Assembly
448148
Cassette Handler with Ergo Loader, 6”/25 Wafer, Brush Finish, IBM Style
-
Axcelis
Assembly
258008
Cassette Handler Assembly, 8"/26 Wafer, Mirror Finish
-
Axcelis
Assembly
258007
Cassette Handler Assembly, 8"/25 Wafer, Mirror Finish
-
Axcelis
Assembly
258009
Cassette Handler Assembly, 6"/25 Wafer, Mirror Finish
-
Axcelis
Assembly
258005
Cassette Handler Assembly, 5"/25 Wafer, Mirror Finish
-
Axcelis
Assembly
258004
Cassette Handler Assembly, 8"/26 Wafer, Mill Finish
-
Axcelis
Assembly
258002
Cassette Handler Assembly, 6"/25 Wafer, Mill Finish
-
Axcelis
Assembly
258001
Cassette Handler Assembly, 8"/25 Wafer, Mill Finish
-
Axcelis
Assembly
237121
Card Cage Assembly
-
Axcelis
Assembly
389593
Bulkhead Assembly (without Blower/Filter)
-
Axcelis
Assembly
389591
Blower Bulkhead Assembly, HEPA Filter, U.S./Japanese Version
-
Axcelis
Assembly
389594
Blower Bulkhead Assembly, HEPA Filter, Japanese 50Hz Version
-
Axcelis
Assembly
389592
Blower Bulkhead Assembly, HEPA Filter, EuropeanVersion
-
Axcelis
Assembly
285592
Baffle Plate Assembly, 8" Wafer
-
Axcelis
Assembly
285591
Baffle Plate Assembly, 6" Wafer
-
Axcelis
Assembly
322703
3-Axis Robot Assembly
-
Axcelis
Assembly
322702
3-Axis Robot Assembly
-
Axcelis
Assembly
322701
3-Axis Robot Assembly
-
Fusion Asher
204331
PLATE-FRONT,8" CHUCK ENCLOSURE
-
Fusion Asher
204303
FIT-CONN, MALE,1/4T,1/16MPT,BR
-
Fusion Asher
204302
FIT-CONN, MALE,1/4T,1/4MPT, SS
-
Fusion Asher
204301
FIT-ADPT, MALE,1/4T,1/8MPT, SS
-
Fusion Asher
204283
SCR-SET, CUP, SKT, SS, NF
-
Fusion Asher
204282
SCR-SET, CUP, SKT, SS, NC
-
Fusion Asher
204281
SCR-SET, CUP, SKT, SS, NF
-
Fusion Asher
204279
THERMOCHUCK ASSY-PCU, EURO *** SEL
-
Fusion Asher
204278
THERMOCHUCK ASSY-M200 GPS,EURO ***
-
Fusion Asher
204277
THERMOCHUCK ASSY-M200, GPS *** SEL
-
Fusion Asher
204276
THERMOCHUCK ASSY-200PCU/POLO *** S
-
Fusion Asher
204274
THERMOCHUCK ASSY-8 INCH *** SELL
-
Fusion Asher
204273
THERMOCHUCK ASSY-8 INCH *INTEL ON
-
Fusion Asher
204262
SCREW-THUMB,1/4-20UNC X 1.50LG
-
Fusion Asher
204261
SCREW-THUMB,1/4-20UNC X 1.68LG
-
Fusion Asher
204233
BEARING-BALL, FLANGED,.3125 ID**SE
-
Fusion Asher
204231
BEARING-BALL, FLANGED, .625 ID
-
Fusion Asher
204201
WAFER PAN-TRANSPORTER
-
Fusion Asher
204191
INSERT-WAFER PAN, ASHER
-
Fusion Asher
203697
IRRAD ASSY-M200PCU, POLO,(D)
-
Fusion Asher
203696
IRRAD ASSY-M200PCU, POLO,(H)
-
Fusion Asher
203695
IRRAD ASSY-M200PCU,POLO,(H-MOD
-
Fusion Asher
203694
IRRAD ASSY-M200PCU, D-MOD BULB
-
Fusion Asher
203693
IRRAD ASSY-M200PCU, H BULB
-
Fusion Asher
203692
IRRAD ASSY-M200PCU, H-MOD BULB
-
Fusion Asher
203691
IRRAD ASSY-M200
-
Fusion Asher
203683
HARNESS ASSY-AC CONTROL, M200
-
Fusion Asher
203682
HARNESS ASSY-AC CONTROL
-
Fusion Asher
203681
HARNESS ASSY-AC CONTROL
-
Fusion Asher
203669
BULB ASSY-UV, PBR29/OF
-
Fusion Asher
203664
BULB ASSY-UV, PBR29D
-
Fusion Asher
203662
BULB ASSY-UV, PBR29H/L
-
Fusion Asher
203661
BULB ASSY-UV, PBR29H
-
Fusion Asher
203581
STOP-BACK, UPLIFT
-
Fusion Asher
203571
FIT-TEE, MALE RUN, 1/4T,1/8MPT
-
Fusion Asher
203561
VALVE-CHECK,1/8-27NPT,0-300PSI
-
Fusion Asher
203381
HARNESS ASSY-HIGH VOLTAGE,M200
-
Fusion Asher
203351
FOAM-NEOPRENE RUBBER, .25THK
-
Fusion Asher
203341
SWITCH-LIMIT, MODIFICATION
-
Fusion Asher
203292
FIT-CONN,PORT,RDC,3/8T,1/4T,SS
-
Fusion Asher
203291
FIT-CONN,PORT,RDC,1/2T,1/4T,SS
-
Fusion Asher
203262
FIT-CONN, MALE,3/8T,1/4MPT, BR
-
Fusion Asher
203261
FIT-CONN, MALE,3/8T,1/8MPT, BR
-
Fusion Asher
203182
VALVE-SOLENOID, 2 WAY, 0-50PSI
-
Fusion Asher
203181
VALVE-SOLENOID, 3 WAY, 0-50PSI
-
Fusion Asher
203161
REGULATOR-MAN MT, 0-150PSI
-
Fusion Asher
203151
CYLINDER-1/2" STROKE
-
Fusion Asher
203142
VALVE-3 WAY DELAY, 0-150PSI
-
Fusion Asher
203141
VALVE-3 WAY, PILOTED, MAN MTG
-
Fusion Asher
203082
VALVE-CHECK, 1/4 TUBE,ADJUST
-
Fusion Asher
202961
BELT-CABLE, CHAIN, DP,80 PITCH
-
Fusion Asher
202911
POSITIONER-INDEXER
-
Fusion Asher
202891
PLATFORM-INDEXER
-
Fusion Asher
202861
LEAD-SCREW, INDEXER
-
Fusion Asher
202782
STOP-BACK, CASSETTE
-
Fusion Asher
202781
STOP-BACK, CASSETTE
-
Fusion Asher
202771
FILTER-DETECTOR BEAM, INDEXER
