본문
Loadlock / Cooldown / Orient
■ Widebody / Narrow Body Loadlock
- Module Assembly Overhaul
- Anodizing or Bare
- Heated Loadlock (Pad or Block)
■ Cassette Indexer Assembly
- Repair and Overhaul
■ Orient Chamber
■ Cooldown Chamber
■ All Parts Can be Supplied Through Production or Repair
상세정보
- 150/200mm conversion and process provided.
- Clean Room Operation.
- Manufacture and refurbishment are possible for All Model.
- We can provide solutions tailored to customer needs.
- Chamber Add-on and Retrofit can be provided.
- Module assembly can be provided.