본문
MxP/MxP+, WxP, eMax/Super-e
■ MxP / MxP+ Chamber
- Wall Exchange
- Chamber Add-on
- Parts Modify Service
■ WxP Chamber
- Wall Exchange
- Chamber Add-on
- Chamber Conversion (M-Chuck to E-Chuck)
- Parts Modify Service
■ eMax / Super-e Chamber
- Wall Exchange
- Chamber Add-on
- Parts Modify Service
■ All Parts Can be Supplied Through Production or Repair
상세정보
- 150/200mm conversion and process provided.
- Clean Room Operation.
- Manufacture and refurbishment are possible for All Model.
- We can provide solutions tailored to customer needs.
- Chamber Add-on and Retrofit can be provided.
- Module assembly can be provided.