본문
ISO Valve Assembly
■ LAM and Axcelis Fusion System ISO Valve Type of Proven
- All Parts Supplied with New One
- NW25 (Angle, Inline)
- NW40 (Angle, Inline)
- NW50 (Angle, Inline)
- Main Chamber ISO Valve (NW100)
- Loadlock ISO Valve with Slow Pump
- Heated ISO Valve
- Normal Open Type ISO Valve
- 2-Stage ISO Valve
상세정보
- Construct the module using verified parts.
- We manufacture and supply modules using new parts.
- We can supply stable parts through numerous tests.
- Repairs and modifications are possible according to customer needs.
- Production and testing are possible according to customer requirements.
- We propose and supply modules with improved performance to customers.